The Tandetron is a high voltage particle accelerator used for Ion Implantation, Ion Beam Analysis and irradiation experiments. This 1.7 MV Tandetron accelerator is a solid-state, gas insulated, high frequency device capable of operation between 0.4 and 1.7 MV. The accelerator can operate either with a sputter-type Multi-Cathode (MC) SNICS ion source or an ECR source. The ECR sources He+ ions (in excess of 1 mA). The ions pass through charge exchange canal and He-1 can be delivered into the tandem. This way we can achieve over 1 uA of HE++ on the target. The MC SNICS ion source can produce ions of many elements at currents ranging up to several µA at the target. This accelerator can deliver ions to either beamline 7 at 30° or beamline 9 at -15° (BL7 and BL9). BL 7 is used for general ion irradiations and implantations and BL9 is used for surface analysis. Beamline 7 terminates in the Multi-Beam Chamber (MBC). The chamber is cryopumped and operates in the 10 -8 Torr regime. This special chamber (MBC) contains a temperature-controlled sample stage for radiation damage experiments between 200°C and 600°C.
Ion Irradiation and Ion Implantation
Ion type: ions from gases and sputtered materials
Ion energy range: < 2.9 MeV for protons , < 4.50 MeV for He
Ion current range: < 2 uA for protons, < 1000 nA for He
Target chamber vacuum: better than 10 -7 Torr
Sample temperature control: -196°C to 650°C
Sample Handling: rapid interchange device
Capabilities: ion implantation, ion beam mixing, radiation damage
Ion Beam Analysis
The 30° beamline is used for ion beam analysis and contains an aperture system for ion channeling. The analysis chamber is turbopumped and equipped for rapid sample turnaround. It contains a two-axis goniometer and detectors for backscattering and glancing angle measurements. Rutherford backscattering spectrometry (RBS), nuclear reaction analysis (NRA) elastic recoil detection (ERD) and ion channeling are conducted in this chamber.
Tandetron -Ion Beam Analysis:
Ion type: gases
Ion energy range: >.5 MeV
Target chamber vacuum: 10 -7 Torr
Detector Arrangement: backscattering, glancing, variable
Sample stage: tilt-rotate goniometer
Sample Handling: rapid interchange device Capabilities: RBS, NRA, ERD, ion channeling
